原子層沉積（Atomic layer deposition, ALD）是通過將氣相前驅(qū)體脈沖交替的通入反應(yīng)器，化學(xué)吸附在沉積襯底上并反應(yīng)形成沉積膜的種方法，是種可以將物質(zhì)以單原子膜形式逐層的鍍?cè)谝r底表面的方法。因此，它是種真正的“納米"技術(shù)，以精確控制方式實(shí)現(xiàn)納米的超薄薄膜沉積。由于ALD用的是飽和化學(xué)吸附的性，因此可以確保對(duì)大面積、多空、管狀、粉末或其他復(fù)雜形狀基體的高保形的均勻沉積。

GEMStar XT 產(chǎn)品點(diǎn)：

l  300℃ 鋁合金熱壁，對(duì)流式溫度控制

l  175℃溫控150ml前驅(qū)體瓶，200℃溫控輸運(yùn)支管

l  可容納多片4，6，8英寸樣品同時(shí)沉積

l  可容納1.25英寸/32mm厚度的基體

l  標(biāo)準(zhǔn)CF-40接口

l  可安裝原位測(cè)量或粉末沉積模塊等選件

l  等離子體輔助ALD插件

l  多種配件可供選擇

GEMStar XT 產(chǎn)品型號(hào)：

GEMStar -4 XT：

l  zui大4英寸/100 mm基片沉積

l  單路前驅(qū)體輸運(yùn)支管， 4路前驅(qū)體瓶接口

l  不可升為等離子體增強(qiáng)ALD

GEMStar -6/8 XT：

l  zui大6英寸(150mm)/8英寸(200mm)基片沉積

l  雙路前驅(qū)體輸運(yùn)支管， 8路前驅(qū)體瓶和CF-40接口

l  可升為等離子體增強(qiáng)ALD

豐富配件：

1、  Lo?c Assaud et al. Systematic increase of electrocatalytic turnover over nanoporous Pt surfaces Prepared by atomic layer deposition. J. Mater. Chem. A (2015) DOI: 10.1039/c5ta00205b

2、  Xiangyi Luo et al. Pd nanoparticles on ZnO-passivated porous carbon by atomic layer deposition: an effective electrochemical catalyst for Li-O2 battery. Nanotechnology(2015) 26, 164003. DOI:10.1088/0957-4484/26/16/164003

3、 HengweiWang, et al. Precisely-controlled synthesis of Au@Pd core–shell bimetallic catalyst via atomic layer deposition for selective oxidation of benzyl alcohol. Journal of Catalysis (2015) 324, 59–68. DOI: 10.1016/j.jcat.2015.01.019

4、  Sean W. Smith, et al. Improved oxidation resistance of organic/inorganic composite atomic layer deposition coated cellulose nanocrystal aerogels. J. Vac. Sci. Technol. A (2014) 4, 32 DOI: 10.1116/1.4882239

5、 Fatemeh Sadat MinayeHashemi et al. A New Resist for Area Selective Atomic and Molecular Layer Deposition on Metal?Dielectric Patterns. J. Phys. Chem. C (2014), 118, 10957?10962. DOI: 10.1021/jp502669f

6、  Jeffrey B. Chou, et.al Enabling Ideal Selective Solar Absorption with 2D Metallic Dielectric Photonic Crystals. Adv. Mater. (2014), DOI: 10.1002/adma.201403302.

7、  Jin Xie, et al. Site-Selective Deposition of Twinned Platinum Nanoparticles on TiSi2 Nanonets by Atomic Layer Deposition and Their Oxygen Reduction Activities. ACS Nano (2013), 7, 6337–6345. DOI: 10.1021/nn402385f

8、 Pengcheng Dai, et al. Solar Hydrogen Generation by Silicon Nanowires Modified with Platinum Nanoparticle Catalysts by Atomic Layer Deposition. Angew. Chem. Int. Ed. (2013), 52, 1 –6. DOI: 10.1002/anie.201303813

9、 Joseph Larkin et al. Slow DNA Transport through Nanoporesin Hafnium Oxide Membranes. ACS Nano (2013), 11, 10121–10128. DOI: 10.1021/nn404326f

10、  Thomas M et al. Extended lifetime MCP-PMTs: Characterization and lifetime measurements of ALD coated microchannel plates, in a sealed photomultiplier tube Nuclear Instruments and Methods in Physics Research A (2013) 732, 388–391. DOI: 10.1016/j.nima.2013.07.023

11、  Kevin J. Maloney et al. Microlattices as architected thin films: Analysis of mechanical properties and high strain elastic recovery. APL Mater. 1, 022106 (2013) DOI: 10.1063/1.4818168

12、   Sean W. Smith et al. Improved Temperature Stability of Atomic Layer Deposition Coated Cellulose Nanocrystal Aerogels. Mater. Res. Soc. Symp. Proc. (2012) DOI: 10.1557/opl.2012.